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甚高频放电中电磁效应与电非对称效应对径向均匀性的影响

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Date of Publication:2022-10-06

Journal:第十八届全国等离子体科学技术会议

Page Number:1

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Pre One:Comparison of electrostatic and electromagnetic simulations for very high frequency plasmas

Next One:相位差效应对氢等离子体瞬时行为和均匀性的影响研究
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