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面向PECVD非晶硅镀膜装备的等离子体数值模拟研发项目
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Leading Scientist:宋远红
Project Participants:zhangyingying,Zhang YuRu,wangyounian
Supported by:企事业单位委托科技项目
Status:在研
Supported by:苏州迈为科技股份有限公司
Nature of Project:横向
Date of Project Approval:2022-11-01
Scheduled completion time:2025-10-31
Date of Project Initiation:2022-11-01
Date of Project Completion:2025-10-31
Current position: