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张莹莹

Senior Engineer


Gender:Female
Alma Mater:大连理工大学
Degree:Doctoral Degree
School/Department:物理学院
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Current position: Home >> Scientific Research >> Research Projects
PECVD非晶硅镀膜装备低气压射频等离子体数模研究

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Leading Scientist:宋远红

Project Participants:张莹莹,张钰如,王友年

Project Source:企事业单位委托科技项目

Status:结题

Supported by:Suzhou Maxon Technology Co., Ltd.

Nature of Project:横向

Date of Project Approval:2021-03-17

Scheduled Completion Time:2022-03-21

Date of Project Initiation:2021-03-22

Date of Project Completion:2023-07-14