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张莹莹

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Gender:Female
Alma Mater:大连理工大学
Degree:Doctoral Degree
School/Department:物理学院
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Current position: Home >> Scientific Research >> Patents
一种提高工艺等离子体均匀性的电极

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First Author:YongXin Liu

Disigner of the Invention:赵凯,张莹莹,王友年

Application Number:CN201810472714.0

Authorization Date:2018-05-17

Authorization Number:CN108682611A

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024