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Alma Mater:大连理工大学
Degree:Doctoral Degree
School/Department:物理学院
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一种提高工艺等离子体均匀性的电极

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First Author:YongXin Liu

Disigner of the Invention:Kai Zhao,zhangyingying,wangyounian

Affilication of Author(s):物理学院

Application Number:CN108682611A

Authorization number:CN201810472714.0

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