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Electrohydrodynamic jet printing of PZT thick film micro-scale structures

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Indexed by:Journal Papers

Date of Publication:2015-11-01

Journal:JOURNAL OF THE EUROPEAN CERAMIC SOCIETY

Included Journals:SCIE、EI

Volume:35

Issue:13

Page Number:3475-3483

ISSN No.:0955-2219

Key Words:Electrohydrodynamic jet; Printing; PZT; Thick film

Abstract:This paper reports the use of a printing technique, called electrohydrodynamic jet printing, for producing PZT thick film micro-scale structures without additional material removing processes. The PZT powder was ball-milled and the effect of milling time on the particle size was examined. This ball-milling process can significantly reduce the PZT particle size and help to prepare stable composite slurry suitable for the E-Jet printing. The PZT micro-scale structures with different features were produced. The PZT lines with different widths and separations were fabricated through the control of the E-Jet printing parameters. The widths of the PZT lines were varied from 80 mu m to 200 mu m and the separations were changed from 5 mu m to 200 mu m. In addition, PZT walled structures were obtained by multi-layer E-Jet printing. The E-Jet printed PZT thick films exhibited a relative permittivity (epsilon(r)) of similar to 233 and a piezoelectric constant (d(33, f)) of similar to 66 pC N-1. (C) 2015 Elsevier Ltd. All rights reserved.

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