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论文类型：期刊论文

发表时间：2009-09-21

发表刊物：Materials Science Forum

收录刊物：EI、CPCI-S、Scopus

卷号：628 629

页面范围：405-410

ISSN号：0878493123

关键字：PZT; Micromoulding; Electrohydrodynamic atomization; MEMS

摘要：In this paper, electrohydrodynamic atomization combined with a polymeric micromoulding technique was used to form PZT single element devices using a PZT sol-gel slurry without an etching process. The PZT single element device was initially designed to work as a piezoelectric ultrasonic transducer consisting of a circular or a square of various sizes, which was produced and used to evaluate the process. The resulting PZT device had a homogenous microstructure. It was observed that the relative permittivity of the circular and square single element devices was especially high at small size due to the fringe effect. The results show that the radius and width of the PZT single circular and square element devices with a thickness of 15μm should be bigger than 400μm in order to reduce the fringe effect. © (2009) Trans Tech Publications, Switzerland.