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个人信息Personal Information
教授
博士生导师
硕士生导师
性别：男
毕业院校：中国科学院长春光学精密机械与物理研究所
学位：博士
所在单位：机械工程学院
学科：机械制造及其自动化
办公地点：机械学院大方楼5021
联系方式：djwudut@dlut.edu.cn 84707625
电子邮箱：djwudut@dlut.edu.cn
碲锌镉晶体高效低损伤CMP工艺研究
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发表时间：2009-01-01
发表刊物：人工晶体学报
期号：2
页面范围：416-421
ISSN号：1000-985X
摘要：A novel kind of self-developed chemical mechanical polishing slurry was employed to polish the CZT crystals. The effects of hardness of polishing pad, variety of abrasives, oxidizer and pH value of slurry on the surface quality and materials removal rate of CZT crystals were analyzed, and a kind of optimal process was achieved. The results show that ultra-smooth and damage-free surface with surface roughness Ra of 0.67 nm of CZT crystal is obtained, when the pH value of slurry is 2.5 and polishing duration is 15 min, which obviously improves the machining efficiency and precision, compared with the traditional machining method.
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