Current position: Home >> Scientific Research >> Paper Publications

高温环境条件下微悬臂梁谐振频率温度特性及测试技术

Release Time:2019-03-13  Hits:

Indexed by: Journal Article

Date of Publication: 2010-01-01

Journal: 仪器仪表学报

Included Journals: ISTIC、PKU

Volume: 31

Issue: 11

Page Number: 2494-2499

Prev One:基于压力自适应的聚合物微器件超声波精密联接

Next One:高温环境下MEMS 微构件动态特性