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高温环境下MEMS 微构件动态特性

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Indexed by:期刊论文

Date of Publication:2010-01-01

Journal:测试技术学报

Included Journals:ISTIC

Volume:24

Issue:1

Page Number:78-83

Pre One:高温环境条件下微悬臂梁谐振频率温度特性及测试技术

Next One:Adaptive pressure ultrasonic precise bonding method for polymer micro joint
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