Current position: Home >> Scientific Research >> Paper Publications

高温环境下MEMS 微构件动态特性

Release Time:2019-03-13  Hits:

Indexed by: Journal Article

Date of Publication: 2010-01-01

Journal: 测试技术学报

Included Journals: ISTIC

Volume: 24

Issue: 1

Page Number: 78-83

Prev One:高温环境条件下微悬臂梁谐振频率温度特性及测试技术

Next One:Adaptive pressure ultrasonic precise bonding method for polymer micro joint