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金属玻璃薄膜的研究进展

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Date of Publication:2022-10-09

Journal:表面技术

Volume:49

Issue:5

Page Number:11-18

ISSN No.:1001-3660

Note:新增回溯数据

Pre One:Synthesis and Its Characteristic of Silicon Nitride Film Deposited by ECR-PECVD at Low Temperature

Next One:采用ECR-PECVD技术低温生长多晶硅薄膜
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