副教授 博士生导师 硕士生导师
任职 : 辽宁省能源材料及器件重点实验室副主任
性别: 男
毕业院校: 大连理工大学
学位: 博士
所在单位: 材料科学与工程学院
学科: 材料物理与化学. 材料表面工程
办公地点: 新三束4#楼311室
联系方式: 0411-84706661-101
电子邮箱: aimin@dlut.edu.cn
开通时间: ..
最后更新时间: ..
点击次数:
发表时间: 2022-10-06
发表刊物: 材料研究学报
卷号: 24
期号: 5
页面范围: 547-549
ISSN号: 1005-3093
摘要: Microcrystalline silicon films were prepared using Ar diluted SiH4
gaseous mixture by electron cyclotron resonance plasma-enhanced chemical
vapor deposition(ECR-PECVD).The effects of the microwave power on
deposition rate,crystallinity,grain size and the configuration of H
existing in microcrystalline silicon films were investigated.The results
show that the crystallinity increases and the concentration of hydrogen
decreases monotonously with the increasing of the microwave power.But
the deposition rate first increases monotonously,and then
decreases.Optimized microwave power is 600 W for the highest deposition
rate.<111〉orientation is the only dominant crystal texture for films
obtained with different power
备注: 新增回溯数据