论文成果
Interface properties and bias temperature instability with ternary H-Cl-N mixed plasma post-oxidation annealing in 4H-SiC MOS capacitors
- 点击次数:
- 发表时间:2022-10-03
- 发表刊物:APPLIED SURFACE SCIENCE
- 所属单位:党委学生工作部(学生工作处、党委武装部)
- 文献类型:J
- 卷号:488
- 页面范围:293-302
- ISSN号:0169-4332