论文成果
Interface properties and bias temperature instability with ternary H-Cl-N mixed plasma post-oxidation annealing in 4H-SiC MOS capacitors
  • 点击次数:
  • 发表时间:2022-10-03
  • 发表刊物:APPLIED SURFACE SCIENCE
  • 所属单位:党委学生工作部(学生工作处、党委武装部)
  • 文献类型:J
  • 卷号:488
  • 页面范围:293-302
  • ISSN号:0169-4332

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