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论文类型:会议论文
发表时间:2014-05-25
收录刊物:EI、Scopus
摘要:[No abstract available]
上一条:Experimental observation of standing wave effect in low-pressure very-high-frequency capacitive discharges
下一条:Experimental investigations of electron density and ion energy distributions in dual-frequency capacitively coupled plasmas for Ar/CF4 and Ar/O-2/CF4 discharges