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Characteristics of Zr-Me-N (Me=Cr, Al, Cu) Films Deposited by Pulsed Bias Arc ion Plating

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Indexed by:期刊论文

Date of Publication:2013-11-01

Journal:RARE METAL MATERIALS AND ENGINEERING

Included Journals:SCIE、PKU、ISTIC

Volume:42

Page Number:83-86

ISSN No.:1002-185X

Key Words:arc ion plating; ternary nitrides; mechanical properties; friction

Abstract:Zirconium based ternary transition metal nitrides films Zr-Me-N (Me=Al, Cr, Cu) were deposited on high-speed steel and silicon substrates by pulsed bias arc ion plating. The composition, structure, and surface morphology of the films were characterized by means of energy dispersive spectroscopy (EDS), X-ray diffraction (XRD), scanning electron spectroscopy (SEM), respectively. The water contact angle measurement was employed for the wettability of the films. The mechanical and tribological properties were investigated by nano-indentation, scratch tester and wear tests, respectively. The results show that the fcc B1 (NaCl) typed phase is the only observed phase in Zr-Cr-N and Zr-Cu-N films. Zr-Me-N films have excellent cohesive strength and holds a rather large water contact angle. The Zr-Al-N film by doping excessive Al exhibits low mechanical properties. A maximum microhardness of 35.5 GPa is obtained for the Zr-Cu-N film. Furthermore, nanocomposite Zr-Cu-N film has a beneficial effect on wear resistance with the lowest friction.

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