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论文类型：会议论文

发表时间：2006-01-01

收录刊物：CPCI-S

页面范围：240-+

摘要：Based on the integrated circuit equipments, this paper respectively introduces the constitute and function of the automated wafer-handling system, the design and principle of the wafer-handling robot, wafer positioning system, and end-effector calibration system. This paper studies the up-down and rotation component, radial linear stretch component, end rotation component and the principle of work. The kinematics analysis of the linear mechanism of radial stretch component is presented.