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个人信息Personal Information
教授
博士生导师
硕士生导师
任职 : 《Plasma Science and Technology》学术期刊编委
性别：男
毕业院校：大连工学院
学位：硕士
所在单位：物理学院
学科：等离子体物理
办公地点：主楼东侧楼（物理系楼）304室
联系方式：0411-84707981
电子邮箱：wangdez@dlut.edu.cn
Model of collisional sheath in spherical and cylindrical geometries for plasma source ion implantation
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论文类型：期刊论文
发表时间：1996-01-01
发表刊物：CHINESE PHYSICS LETTERS
收录刊物：SCIE、CSCD、Scopus
卷号：13
期号：2
页面范围：117-120
ISSN号：0256-307X
关键字：等离子体; 离子注入技术; 护套; 模型
摘要：A model is developed that describes the temporal evolution of the sheath during a pulse of high negative voltage applied to a spherical and cylindrical target in a plasma such as that present in plasma source ion implantation for the case in which the pressure of the neutral gas is large enough that the ion motion in the sheath can he assumed to be highly collisional. The analytic expressions of the sheath expanding velocity are obtained. The positions of the sheath edge as a function of time predicted by the model are in agreement with those obtained by fluid equations.