大连理工大学主页平台管理系统徐军--徐军-- Influence of N-2 flow rate on the mechanical properties of SiNx films deposited by microwave electron cyclotron resonance magnetron sputtering

徐军

访问量：

开通时间：..

最后更新时间：..

当前位置: 徐军 >> 科学研究 >> 论文成果

Influence of N-2 flow rate on the mechanical properties of SiNx films deposited by microwave electron cyclotron resonance magnetron sputtering

点击次数：

发表时间：2022-10-03

发表刊物：THIN SOLID FILMS

卷号：518

期号：8

页面范围：2077-2081

ISSN号：0040-6090

上一条：Improvement of the Harmonic Technique of Probe for Measurements of Electron Temperature and Ion Density

下一条：Influence of the bias signal amplitude and frequency on the harmonic probe measurements in plasma diagnostics