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发表时间:2022-10-03
发表刊物:Plasma Science and Technology
卷号:18
期号:1
页面范围:58-61
ISSN号:1009-0630
上一条:Improved inflection point method of emissive probe for accurate measurement of plasma potential
下一条:Influence of N-2 flow rate on the mechanical properties of SiNx films deposited by microwave electron cyclotron resonance magnetron sputtering