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发表时间:2022-10-03
发表刊物:JOURNAL OF VACUUM SCIENCE TECHNOLOGY A
卷号:34
期号:6
ISSN号:0734-2101
上一条:Investigation of temperature-dependent ferroelectric properties of Y-doped HfO2 thin film prepared by medium-frequency reactive magnetron co-sputtering
下一条:Improvement of the Harmonic Technique of Probe for Measurements of Electron Temperature and Ion Density