大连理工大学主页平台管理系统 zhuxianglong--Home-- Surface shape control of the workpiece in a double-spindle triple-workstation wafer grinder

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Degree:Doctoral Degree
School/Department:机械工程学院

Gender:Male

Alma Mater:大连理工大学

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Surface shape control of the workpiece in a double-spindle triple-workstation wafer grinder

Date of Publication:2022-10-09 Hits:

Journal:Journal of Semiconductors
Affiliation of Author(s):机械工程学院
Volume:32
Issue:10
ISSN No.:1674-4926
Date of Publication:2022-10-09