大连理工大学主页平台管理系统 zhuxianglong Surface shape control of the workpiece in a double-spindle triple-workstation wafer grinder Home

Personal Information

Degree:Doctoral Degree
School/Department:机械工程学院

Discipline:Mechanical Manufacture and Automation

Gender:Male

Alma Mater:大连理工大学

Current position: Home / Scientific Research / Paper Publications

Surface shape control of the workpiece in a double-spindle triple-workstation wafer grinder

Release Time:2022-10-17 Hits:

Date of Publication:2022-10-09
Journal:Journal of Semiconductors
Institution:机械工程学院
Volume:32
Issue:10
ISSN:1674-4926