大连理工大学主页平台管理系统 zhuxianglong A novel piezoelectric grinding dynamometer for monitoring ultra-precision grinding of silicon wafers Home

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Degree:Doctoral Degree
School/Department:机械工程学院

Discipline:Mechanical Manufacture and Automation

Gender:Male

Alma Mater:大连理工大学

Current position: Home / Scientific Research / Paper Publications

A novel piezoelectric grinding dynamometer for monitoring ultra-precision grinding of silicon wafers

Release Time:2022-10-17 Hits:

Date of Publication:2022-10-05
Journal:Advanced materials research
Institution:机械工程学院
Volume:126-128
Page Number:707-712