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Degree:Doctoral Degree
School/Department:机械工程学院

Gender:Male

Alma Mater:大连理工大学

Current position: Home / Scientific Research / Paper Publications

A novel chemical mechanical polishing slurry for yttrium aluminum garnet crystal

Date of Publication:2022-10-05 Hits:

Journal:APPLIED SURFACE SCIENCE
Volume:496
ISSN No.:0169-4332
Date of Publication:2022-10-05