大连理工大学主页平台管理系统 zhuxianglong Research on extending electrolyte life using diatomite in electrochemical abrasive machining Home

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Degree:Doctoral Degree
School/Department:机械工程学院

Discipline:Mechanical Manufacture and Automation

Gender:Male

Alma Mater:大连理工大学

Current position: Home / Scientific Research / Paper Publications

石英晶片化学机械抛光工艺优化

Release Time:2024-07-18 Hits:

Date of Publication:2024-05-25
Journal:微纳电子技术
Volume:60
Issue:01
Page Number:159-164
Key Words:化学机械抛光(CMP); 工艺优化; 平面度; 石英晶片; 表面粗糙度
CN:13-1314/TN