Personal Homepage

Personal Information

MORE+

Degree:Doctoral Degree
School/Department:机械工程学院

Discipline:Mechanical Manufacture and Automation

DALIAN UNIVERSITY OF TECHNOLOGY      Login     

zhuxianglong

+

Gender:Male

Alma Mater:大连理工大学

Paper Publications

Current position: Home / Scientific Research / Paper Publications
Model for surface topography prediction in the ultra-precision grinding of silicon wafers considering volumetric errors
Release Time:2024-07-18  Hits:

Indexed by:Journal Papers
Document Code:392844
Date of Publication:2024-07-18
Journal:MEASUREMENT
Volume:234
ISSN:0263-2241
Key Words:ACCURACY; COMPENSATION; GEOMETRIC ERROR; IDENTIFICATION; MACHINE; MATHEMATICAL-MODEL; ROTARY AXIS; SHAPE; SUBSURFACE DAMAGE

Prev One:磨床床身立柱固定结合面动态特性研究

Next One:石英晶片化学机械抛光工艺优化

  • Click:
  • MOBILE Version

The Last Update Time:..

Open Time:..

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024