Date of Publication:2024-11-02
Journal:Precision Engineering
ISSN:0141-6359
Key Words:Dynamics model; Grinding force; Iterative method; Vibration equation; Wafer precision grinding; Workpiece rotation method
zhuxianglong
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Gender:Male
Alma Mater:大连理工大学
Paper Publications
Simulation modeling of wafer grinding surface roughness considering grinding vibration
Release Time:2024-12-04 Hits: