点击次数：

论文类型：期刊论文

发表时间：2018-07-01

发表刊物：MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

收录刊物：SCIE

卷号：24

期号：7

页面范围：2949-2956

ISSN号：0946-7076

摘要：One of the core components of piezoelectric inkjet print-head is the piezoelectric vibrating plate which directly affects the jet performance of a print-head. In the present paper, a simplified coupling model theory of the composite vibrating plate was studied in combination with the actual manufacturing process of the piezoelectric vibrating plate. The 'spring structure' is formed by releasing the long edge of Lead Zirconate Titanate (PZT) thin films to enhance the amplitude of the piezoelectric vibrating plate. The laser Doppler measurement was carried out on the piezoelectric vibrating plate, and the results were verified by using numerical simulation. The results show that the 'spring structure' can effectively improve the amplitude and average deformation rate of the piezoelectric vibration plate in the air while does not affect the deformation time. The amplitude of the vibrating plate with spring structure increased continuously in the dwelling stage of the drive signal when the ink was inspired. Moreover, the magnitude of residual vibration also increased.