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个人信息Personal Information
教授
博士生导师
硕士生导师
性别：男
毕业院校：威尔大学
学位：博士
所在单位：机械工程学院
学科：微机电工程
办公地点：机械工程学院2号楼214-2
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研究领域
微/纳机电系统（MEMS），微纳加工技术，半导体材料、器件与集成电路，光学仪器与测试计量技术。
主要研究内容：①跨尺度微纳器件设计理论与制造技术；②微压电喷墨打印技术；③电液动力微纳直写打印技术；④微纳流控生物芯片设计与制造。
- Yang, Xue.Yin, ZF (reprint author), Jilin Univ, Sch Mech & Aerosp Engn, Changchun 130012, Jilin, Peoples R China..Cheng, E.,Zou, Helin,Wang, Dong F.,Jiang, Xinyan,Yin, Zhifu,Chen, Kai.An economic and concise method to solve nozzle clogging issue during electro hydrodynamic printing[J],INTERNATIONAL JOURNAL OF MODERN PHYSICS B,2019,33(23)
- Yang, Zheng.Zou, HL (reprint author), Dalian Univ Technol, Key Lab Micro Nano Technol & Syst Liaoning Prov, Dalian 116024, Peoples R China..Zou, Helin,Chen, Da,Li, Chen,Wang, Xing,Li, Kehong,Wang, Qiusen,Qi, Liping.Double-layer resist method to improve descum result when removing negative photoresist[J],MICRO & NANO LETTERS,2019,14(6):694-697
- Sun, Lei.Zou, HL (reprint author), Dalian Univ Technol, Minist Educ, Key Lab Precis & Nontradit Machining Technol, Dalian, Peoples R China.; Zou, HL (reprint author), Dalian Univ Technol, Key Lab Micro Nano Technol & Syst Liaoning Prov, Dalian, Peoples R China..Yin, Zhifu,Wu, Dongjiang,Zou, Helin,Liu, Lingpeng,Qi, Liping,Zhou, Jiangang.A new low-cost fabrication method of SU-8 micro-nano channels and needle tip in electro-hydrodynamic jet chips[J],JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2018,28(11)
- Wang, Fuan.Zou, HL (reprint author), Dalian Univ Technol, Key Lab Micro Nano Technol & Syst Liaoning Prov, Dalian 116024, Peoples R China.; Zou, HL (reprint author), Dalian Univ Technol, Minist Educ, Key Lab Precis & Nontradit Machining Technol, Dalian 116024, Peoples R China..Zou, Helin,Wang, Qiusen,Dou, Jiao,Li, Qi,Zhou, Jiangang,Wang, Xing,Chen, Da.Effect of Ce doping on crystalline orientation, microstructure, dielectric and ferroelectric properties of (100)-oriented PCZT thin films via sol-gel method[J],JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS,2018,29(21):18668-18673
- Xiao, Xiaolei.Zou, HL (reprint author), Dalian Univ Technol, Key Lab Micro Nano Technol & Syst Liaoning Prov, Dalian 116024, Peoples R China..Dou, Jiao,Wang, Shangfei,Zou, Helin,Wang, Xing,Chen, Da.A waveform design method for piezoelectric inkjet printhead with Doppler vibration test and numerical simulation[J],MICROELECTRONIC ENGINEERING,2018,196:13-19
- Wang, Xing.Zou, HL (reprint author), Dalian Univ Technol, Key Lab Micro Nano Technol & Syst Liaoning Prov, Dalian 116024, Peoples R China..Dou, Jiao,Zou, Helin,Qi, Liping,Wang, Qiusen,Xiao, Xiaolei.Effects of the 'spring structure' on the performance of a vibrating plate of the piezoelectric inkjet print-head[J],MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,2018,24(7):2949-2956
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- 聚合物喷针纳米通道中电液动力射流体尺度效应的研究,国家自然科学基金项目,2017-08-17,2022-04-18,结题
- 压电喷射及打印机的喷头与耗材的匹配研究,企事业单位委托科技项目,2016-06-25,2021-12-27,结题
- 二维纳米模具制造,自选课题,2016-06-15,2020-06-30,结题
- MEMS聚合物微环光波导制造,企事业单位委托科技项目,2014-07-24,结题
- 压电喷头的工程样头制作,企事业单位委托科技项目,2013-07-15,2020-06-30,结题
- 微系统集成硅基纳升电喷雾电离器的研制,省、市、自治区科技项目,2008-01-01,2023-09-13,结题