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个人信息Personal Information
教授
博士生导师
硕士生导师
性别:男
毕业院校:威尔大学
学位:博士
所在单位:机械工程学院
学科:微机电工程
办公地点:机械工程学院2号楼214-2
联系方式:办公电话:0411-84709754
电子邮箱:zouhl@dlut.edu.cn
Effect of Ce doping on crystalline orientation, microstructure, dielectric and ferroelectric properties of (100)-oriented PCZT thin films via sol-gel method
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论文类型:期刊论文
发表时间:2018-11-01
发表刊物:JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
收录刊物:SCIE、Scopus
卷号:29
期号:21
页面范围:18668-18673
ISSN号:0957-4522
关键字:Cerium; Crystalline materials; Ferroelectric films; Microstructure; Perovskite; Scanning electron microscopy; Semiconductor doping; Sols, Annealing process; Cerium doping; Cerium-doped; Crystalline orientations; Dielectric and ferroelectric properties; Gel process; Perovskite structures; Remnant polarizations, Thin films
摘要:Pb1.2-xCexZr0.52Ti0.48O3 (PCZT, x=0%, 0.1%, 0.5%, 1%, 2% and 3%) thin films with the thickness of about 1 mu m were fabricated by sol-gel process and traditional annealing process on Pt/Ti/SiO2/Si substrates to investigate the effect of cerium doping on crystalline orientation, microstructure and electric properties of the samples. (100)-oriented Pb1.2-xCexZr0.52Ti0.48O3 films were obtained for all x values. The results of Scanning electron microscopy (SEM) revealed that the 0%, 0.1%, 0.5%, and 1% cerium doped Pb1.2-xCexZr0.52Ti0.48O3 films have a dense columnar perovskite structure. The maximum dielectric constant and remnant polarization were obtained for 0.1% Ce-doped film.