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论文类型：期刊论文

发表时间：2018-01-01

发表刊物：MATERIALS AND MANUFACTURING PROCESSES

收录刊物：SCIE、EI、Scopus

卷号：33

期号：8

页面范围：898-904

ISSN号：1042-6914

关键字：Bonding; conical nozzle; inkjet printhead; noncontact UV photolithography; optimization; processes; simulations; SU-8 photoresist

摘要：A novel conical nozzle fabrication method for piezoelectric inkjet printhead is proposed based on the microelectromechanical system technology. By optimizing the exposure gap, exposure dose, postexposure bake (PEB), and development time, the SU-8 conical nozzle was fabricated. After thermal bonding with an open chamber, the piezoelectric inkjet printhead chamber was formed. The results show that the optimum SU-8 conical nozzle can be fabricated by applying exposure dose of 105mJ/cm(2), exposure gap of 50 mu m, PEB temperature of 65 degrees C, PEB time of 10min, and development time of 210s. The final size of optimum conical nozzle is the large aperture of 30.46 +/- 1.17 mu m, small aperture of 20.34 +/- 1.42 mu m, and nozzle height of 45.38 +/- 1.02 mu m.