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等离子体反应腔室的多场耦合模型建立及实验验证

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Leading Scientist:wangyounian

Supported by:主管部门科技项目

Status:结题

Supported by:教育部科技发展中心

Nature of Project:纵向

Project Approval Number:20090041110026

Date of Project Approval:2009-12-02

Scheduled completion time:2012-12-31

Date of Project Initiation:2010-01-01

Date of Project Completion:2012-12-31

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