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双频容性耦合等离子体沉积多晶硅薄膜的机理研究

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Leading Scientist:wangyounian

Supported by:省、市、自治区科技项目

Status:结题

Supported by:辽宁省教育厅

Nature of Project:纵向

Project Approval Number:2008T229

Date of Project Approval:2008-01-01

Scheduled completion time:2010-12-31

Date of Project Initiation:2008-01-01

Date of Project Completion:2023-09-13

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