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等离子体工艺腔室的多场耦合仿真

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Leading Scientist:wangyounian

Supported by:科技部重大专项

Status:结题

Supported by:清华大学

Nature of Project:纵向

Project Approval Number:2011ZX02403-001

Date of Project Approval:2011-01-01

Scheduled completion time:2014-12-30

Date of Project Initiation:2011-01-01

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