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等离子体工艺腔室仿真及实验评价

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Leading Scientist:wangyounian

Supported by:国家科技部

Status:结题

Supported by:比利时安特威普大学

Nature of Project:纵向

Project Approval Number:2012DFG02150

Date of Project Approval:2012-06-01

Scheduled completion time:2014-06-01

Date of Project Initiation:2012-06-01

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