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射频感性耦合等离子体源仿真模拟

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Leading Scientist:wangyounian

Supported by:企事业单位委托科技项目

Status:结题

Supported by:哈尔滨工业大学

Nature of Project:横向

Date of Project Approval:2013-06-01

Scheduled completion time:2014-09-30

Date of Project Initiation:2013-06-01

Date of Project Completion:2014-09-30

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