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PECVD工艺气体放电仿真

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Leading Scientist:wangyounian

Supported by:企事业单位委托科技项目

Status:结题

Supported by:中国科学院沈阳科学仪器股份有限公司

Nature of Project:横向

Date of Project Approval:2012-06-14

Scheduled completion time:2012-12-31

Date of Project Initiation:2012-06-14

Date of Project Completion:2012-12-31

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