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12英寸PEVCD腔室的等离子体仿真及诊断

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Leading Scientist:wangyounian

Supported by:企事业单位委托科技项目

Status:结题

Supported by:中国科学院沈阳科学仪器研制中心有限公司

Nature of Project:横向

Date of Project Approval:2009-12-20

Scheduled completion time:2010-12-20

Date of Project Initiation:2009-12-20

Date of Project Completion:2010-12-20

Pre One:电容耦合等离子体增强化学气相沉淀(PECVD)仿真

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