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电容耦合等离子体增强化学气相沉淀(PECVD)仿真

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Leading Scientist:wangyounian

Supported by:企事业单位委托科技项目

Status:结题

Supported by:北京北方微电子基地设备工艺研究中心有限责任公司

Nature of Project:横向

Date of Project Approval:2008-06-15

Scheduled completion time:2008-12-30

Date of Project Initiation:2008-06-15

Date of Project Completion:2008-12-30

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