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PECVD等离子体仿真及诊断

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Leading Scientist:wangyounian

Supported by:企事业单位委托科技项目

Status:结题

Supported by:中国科学院沈阳仪器研制中心有限公司

Nature of Project:横向

Date of Project Approval:2008-02-22

Scheduled completion time:2008-07-22

Date of Project Initiation:2008-02-22

Date of Project Completion:2008-07-22

Pre One:大功率低压射频感性耦合负氢离子源的物理基础研究

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