Current position: Home >> Scientific Research >> Research Projects

超低气压下感性耦合放电的加热机理研究

Hits:

Leading Scientist:张权治

Project Participants:wangyounian,Fei Gao

Supported by:其他课题

Sub-Class of Project:实验室开放课题

Status:在研

Supported by:北京控制工程研究所

Nature of Project:纵向

Date of Project Approval:2021-03-07

Scheduled completion time:2022-09-07

Date of Project Initiation:2021-03-07

Pre One:PECVD非晶硅镀膜装备低气压射频等离子体数模研究

Next One:等离子体仿真开发技术及其相关应用研究合同