Current position: Home >> Scientific Research >> Research Projects

PECVD非晶硅镀膜装备低气压射频等离子体数模研究

Hits:

Leading Scientist:宋远红

Project Participants:zhangyingying,Zhang YuRu,wangyounian

Supported by:企事业单位委托科技项目

Status:结题

Supported by:苏州迈为科技股份有限公司

Nature of Project:横向

Date of Project Approval:2021-03-17

Scheduled completion time:2022-03-21

Date of Project Initiation:2021-03-22

Date of Project Completion:2023-07-14

Pre One:PECVD非晶硅镀膜装备低气压射频等离子体实验诊断研究项目

Next One:超低气压下感性耦合放电的加热机理研究