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射频电源等离子体技术合作项目

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Leading Scientist:高飞

Project Participants:YongXin Liu,wangyounian

Supported by:企事业单位委托科技项目

Status:结题

Supported by:华为技术有限公司

Nature of Project:横向

Date of Project Approval:2021-03-01

Scheduled completion time:2022-02-28

Date of Project Initiation:2021-03-01

Date of Project Completion:2022-02-28

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