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为等离子体均匀性控制改进

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Leading Scientist:宋远红

Project Participants:zhangquanzhi,Zhang YuRu,YongXin Liu,Fei Gao,wangyounian

Supported by:企事业单位委托科技项目

Status:结题

Supported by:东京毅力科创株式会社

Nature of Project:横向

Date of Project Approval:2021-01-22

Scheduled completion time:2021-12-31

Date of Project Initiation:2021-01-01

Date of Project Completion:2023-07-14

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