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Professor Supervisor of Doctorate Candidates Supervisor of Master's Candidates

Paper Publications

[191]Liu Wenyao, Zhu Aimin, Li Xiaosong, Zhao Guoli, Lu Wenqi, Xu Yong, Wang Younian, Xu, Y (reprint author), Dalian Univ Technol, Lab Plasma Phys Chem, Dalian 116024, Peoples R China..Determination of Plasma Parameters in a Dual-Frequency Capacitively Coupled CF4 Plasma Using Op...[J],PLASMA SCIENCE & TECHNOLOGY,2013,15(9):885-890
[192]Li, Yun-Hu, Wang, You-Nian, Xue-Chun, XC (reprint author), Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116024, Liaoning, Peoples R China..Numerical simulation of plasma immersion ion implantation on the inner surface of a cylindrical...[J],SURFACE & COATINGS TECHNOLOGY,2013,229:168-171
[193]刘岳, 张权治, 王友年.射频磁控Ar/O2混合等离子体PIC/MCC模拟[A],2013,149-149
[194]王岩, 徐翔, 王友年.外加会切磁场对感应耦合等离子体放电过程的影响[A],2013,234-234
[195]张赛谦, 戴忠玲, 宋远红, 王友年.双频容性耦合Ar/CF4等离子体中双频源参数对刻蚀微观不均匀性影响的研究[A],2013,252-252
[196]孙晓艳, 李雪春, 王友年.射频感应耦合Ar/Cl2等离子体特性模拟研究[A],2013,275-275
[197]刘巍, 高飞, 赵书霞, 王友年.射频感应耦合CF4/Ar等离子体中模式转换的实验研究[A],2013,286-286
[198]李雪春, 王莹莹, 丁振峰, 王友年.脉冲调制射频大气压氩气放电数值模拟研究[A],2013,274-274
[199]贾文柱, 王喜凤, 宋远红, 王友年.脉冲调制射频容性耦合SiH4/N2/O2放电的二维流体力学模拟[A],2013,277-277
[200]刘永新, 张权治, 刘佳, 陆文琪, 王友年.双频容性耦合氧气放电中电子反弹共振加热[A],2013,322-322

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