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论文类型：期刊论文

发表时间：2015-07-01

发表刊物：PLASMA SCIENCE & TECHNOLOGY

收录刊物：SCIE、EI、Scopus

卷号：17

期号：7

页面范围：560-566

ISSN号：1009-0630

关键字：sheath; IEDs; tailed pulse-bias waveform; hybrid model; charging effect

摘要：A hybrid sheath model, including a fluid model and a Monte Carlo (MC) method, is proposed to study ion energy distributions (IEDs) driven by a radiofrequency (RF) with a tailed pulse-bias on an insulating substrate, where a charging effect is obviously caused by the ions accumulated. This surface charging effect will significantly affect the IEDs on the insulating substrate. In this paper, a voltage compensation method is employed to eliminate the charging effect by making the pulse-bias waveform have a certain gradient. Furthermore, we investigate the IEDs under the condition of different pulse-bias duty ratios, waveforms, amplitudes, and cycle proportions. It is found that the parameters of the pulsed source can effectively modulate the IEDs on the insulating substrate and the charging effect, and more desired IEDs are obtained by using the voltage compensation method with modulations of pulse parameters.