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论文类型：期刊论文

发表时间：2011-10-01

发表刊物：PLASMA SCIENCE & TECHNOLOGY

收录刊物：Scopus、SCIE、EI

卷号：13

期号：5

页面范围：513-518

ISSN号：1009-0630

关键字：collisional sheath; pulse and RF; hybrid model; IED; IAD

摘要：A hybrid model is used to simulate the characteristics of a collisional sheath in a capacitively coupled plasma (CCP) driven by a dual frequency source including a RF and a pulsed current source applied to the same electrode. The hybrid model includes a fluid model used to simulate the characteristics of the collisional sheath, and a Monte-Carlo (MC) method to obtain both ion energy and ion angular distributions (IEDs and IADs) impinging on the substrate. The effects of the low frequency of the pulsed source and the gas pressure on the characteristics of the sheath, as well as the IEDs and IADs, are studied. The results show that the ratio of pulse/RF frequency and the gas pressure are crucial for the characteristics of the sheath and the IEDs. The IADs are significantly more sensitive to the gas pressure.