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Electron bounce resonance heating in dual-frequency capacitively coupled oxygen discharges

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Indexed by:期刊论文

Date of Publication:1993-01-01

Journal:PLASMA SOURCES SCIENCE & TECHNOLOGY

Volume:22

Issue:2

Page Number:25012-25012

Pre One:等离子体源离子注入鞘层随时空演化的数值模拟
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