CB8sb1TT5MgHhatVjtX2H2FvbjO6ghgvr7hCyjjqPuYMcwNUk3vtaPEeDTVj
Current position: Home >> Scientific Research >> Paper Publications

Investigation of temperature-dependent ferroelectric Properties of Y-doped HfO2 thin film prepared by middle-frequency reactive magnetron co-sputtering

Release Time:2023-02-09  Hits:

Date of Publication: 2022-10-03

Journal: 真空

Volume: 195

Issue: 5

Page Number: 109506-109506

Prev One:Investigation of settlement monitoring method based on distributed Brillouin fiber optical sensor

Next One:Investigation of temperature-dependent ferroelectric properties of Y-doped HfO2 thin film prepared by medium-frequency reactive magnetron co-sputtering