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XU Jun
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Associate Professor Supervisor of Doctorate Candidates Supervisor of Master's Candidates
Patents
[1] 掩模限位连续组分扩展薄膜材料库制备方法
[2] 等离子体诊断用多功能探针
[3] 射频等离子体探针装置
[4] 一种凸凹探针及其等离子体诊断方法
[5] 一种射频放电等离子体自偏置探针诊断方法
[6] 一种自动扫描发射探针装置
[7] 一种射频放电等离子体诊断装置
[8] 数据采集卡的等效采样方法
[9] 用于等离子体诊断的复合探针
[10] 一种等离子体增强非平衡磁控溅射方法
TOTAL 24 PIECE 1/3
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