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用于等离子体诊断的复合探针

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First Author:dengxinlv

Disigner of the Invention:刘莉莹,邓凡,Wenqi Lu,zhangjialiang,XU Jun,Mu Zongxin

Affilication of Author(s):物理学院

Application Number:CN1380811

Authorization number:CN02109519.1

Pre One:数据采集卡的等效采样方法

Next One:一种等离子体增强非平衡磁控溅射方法
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